Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Prediction Of Material Removal Rate And Interpretation Of Sensor Importance In Wafer Polishing Using Explainable Convolutional Neural Network
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김병훈 | - |
| dc.date.accessioned | 2022-07-19T03:06:47Z | - |
| dc.date.available | 2022-07-19T03:06:47Z | - |
| dc.date.issued | 2021-10-25 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/110233 | - |
| dc.title | Prediction Of Material Removal Rate And Interpretation Of Sensor Importance In Wafer Polishing Using Explainable Convolutional Neural Network | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | INFORMS annual meeting 2021 | - |
| dc.citation.conferencePlace | 온라인 | - |
- Files in This Item
- There are no files associated with this item.
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Kim, Byunghoon
- ERICA 공학대학 (DEPARTMENT OF INDUSTRIAL & MANAGEMENT ENGINEERING)