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Capacitive humidity sensing properties of freestanding bendable porous SiO2/Si thin films
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Park, Soobin | - |
| dc.contributor.author | Seo, Jinmyeong | - |
| dc.contributor.author | Park, Jungjoon | - |
| dc.contributor.author | Hwang, Inseong | - |
| dc.contributor.author | Lee, Han-Seung | - |
| dc.contributor.author | Jung, Hyunsung | - |
| dc.contributor.author | Yoo, Bongyoung | - |
| dc.date.accessioned | 2022-12-20T05:54:00Z | - |
| dc.date.available | 2022-12-20T05:54:00Z | - |
| dc.date.issued | 2022-07 | - |
| dc.identifier.issn | 2045-2322 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/111378 | - |
| dc.description.abstract | The fabrication of freestanding bendable films without polymer substrates is demonstrated as a capacitive humidity-sensing material. The bendable and porous SiO2/Si films are simply prepared by electrochemical-assisted stripping, metal-assisted chemical etching, followed by oxidation procedures. The capacitive humidity-sensing properties of the fabricated porous SiO2/Si film are characterized as a function of the relative humidity and frequency. The remarkable sensing performance is demonstrated in the wide RH range from 13.8 to 79.0%. The sensing behavior of the porous SiO2/Si film is studied by electrochemical impedance spectroscopy analysis. Additionally, the reliability of the porous SiO2/Si sensing material is confirmed by cyclic and long-term sensing tests. | - |
| dc.format.extent | 8 | - |
| dc.language | 영어 | - |
| dc.language.iso | ENG | - |
| dc.publisher | Nature Publishing Group | - |
| dc.title | Capacitive humidity sensing properties of freestanding bendable porous SiO2/Si thin films | - |
| dc.type | Article | - |
| dc.publisher.location | 영국 | - |
| dc.identifier.doi | 10.1038/s41598-022-15955-4 | - |
| dc.identifier.scopusid | 2-s2.0-85133717725 | - |
| dc.identifier.wosid | 000822436100033 | - |
| dc.identifier.bibliographicCitation | Scientific Reports, v.12, no.1, pp 1 - 8 | - |
| dc.citation.title | Scientific Reports | - |
| dc.citation.volume | 12 | - |
| dc.citation.number | 1 | - |
| dc.citation.startPage | 1 | - |
| dc.citation.endPage | 8 | - |
| dc.type.docType | Article | - |
| dc.description.isOpenAccess | Y | - |
| dc.description.journalRegisteredClass | scie | - |
| dc.description.journalRegisteredClass | scopus | - |
| dc.relation.journalResearchArea | Science & Technology - Other Topics | - |
| dc.relation.journalWebOfScienceCategory | Multidisciplinary Sciences | - |
| dc.subject.keywordPlus | ELECTRONIC SKIN | - |
| dc.subject.keywordPlus | SENSOR | - |
| dc.subject.keywordPlus | PERFORMANCE | - |
| dc.subject.keywordPlus | RESPIRATION | - |
| dc.subject.keywordPlus | LAYER | - |
| dc.subject.keywordPlus | WATER | - |
| dc.identifier.url | https://www.nature.com/articles/s41598-022-15955-4 | - |
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Related Researcher
- Lee, Han Seung
- ERICA 공학대학 (MAJOR IN ARCHITECTURAL ENGINEERING)