Precision Measurement of Linear Profile Using Four-Probe Sequential Error Separation Method

Abstract

Herein, the sequential four-probe method (SFPM), a novel method for obtaining high-density line surface profiles, is proposed. To obtain accurate measurement results using many measurement points, a new surface reconstruction method is developed using the relationship between the existing sequential three-probe method (STPM) and an additional auxiliary probe. The relationship between datasets acquired using the STPM and data acquired from the auxiliary probe is analyzed, and a method for estimating an accurate surface profile using the relationship is described comprehensively. An experiment is conducted using numerical verification to confirm the performance of the proposed method. The result confirms that the proposed method can yield extremely accurate and strict results compared with previously developed error separation techniques.