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고주파 라인 프로파일 측정을 위한 개선된 Combined Three-probe 오차분리법
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 조남규 | - |
| dc.date.accessioned | 2024-01-10T05:01:47Z | - |
| dc.date.available | 2024-01-10T05:01:47Z | - |
| dc.date.issued | 2021-05-14 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/116446 | - |
| dc.title | 고주파 라인 프로파일 측정을 위한 개선된 Combined Three-probe 오차분리법 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 한국정밀공학회 2021 춘계학술대회 | - |
| dc.citation.conferencePlace | 비대면 온라인 발표 | - |
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Related Researcher
- CHO, NAHM GYOO
- ERICA 공학대학 (DEPARTMENT OF MECHANICAL ENGINEERING)