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Construction of plasma resistant multi-layers using nano thin film deposition process
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 조홍백 | - |
| dc.date.accessioned | 2024-07-20T10:32:07Z | - |
| dc.date.available | 2024-07-20T10:32:07Z | - |
| dc.date.issued | 2024-03-29 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/120046 | - |
| dc.title | Construction of plasma resistant multi-layers using nano thin film deposition process | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | (사) 한국분말재료학회 2024년 춘계학술대회 | - |
| dc.citation.conferencePlace | 인천광역시, 송도컨벤시아 | - |
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Related Researcher
- Hong-Baek, Cho
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)