Static force measurement using piezoelectric sensors

Abstract

In force measurement applications, a piezoelectric force sensor is one of the most popular sensors due to its advantages of low cost, linear response, and high sensitivity. Piezoelectric sensors effectively convert dynamic forces to electrical signals by the direct piezoelectric effect, but their use has been limited in measuring static forces due to the easily neutralized surface charge. To overcome this shortcoming, several static (either pure static or quasistatic) force sensing techniques using piezoelectric materials have been developed utilizing several unique parameters rather than just the surface charge produced by an applied force. The parameters for static force measurement include the resonance frequency, electrical impedance, decay time constant, and capacitance. In this review, we discuss the detailed mechanism of these piezoelectric-type, static force sensing methods that use more than the direct piezoelectric effect. We also highlight the challenges and potentials of each method for static force sensing applications. © 2021 Kyungrim Kim et al.