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Computer simulation study for the design of a capacitively coupled plasma reactor for efficient formation of silicon nano particles
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김호준 | - |
| dc.date.accessioned | 2025-07-06T08:31:37Z | - |
| dc.date.available | 2025-07-06T08:31:37Z | - |
| dc.date.issued | 2024-08-20 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/125984 | - |
| dc.title | Computer simulation study for the design of a capacitively coupled plasma reactor for efficient formation of silicon nano particles | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2024 International Forum on Functional Materials | - |
| dc.citation.conferencePlace | 제주 신화 월드 | - |
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Related Researcher
- Kim, Ho Jun
- ERICA 공학대학 (DEPARTMENT OF MECHANICAL ENGINEERING)