The spatial synchronization of areal measurement data sets by multi-probes

Abstract

In this paper, to release this induced errors and improve the accuracy of the measured data, a new spatial synchronization method is proposed to spatially synchronize the three-dimensional surface data sets obtained by variety surface topography measuring instruments. The proposed spatial synchronization method minimizes the geometrical error components using the data interpolation, the least squares method, and the two-dimensional cross correlation function. For verification of the method, it was applied to the measured data sets measured with a chromatic confocal microscopy, a laser scanning confocal microscopy, and an ellipsometer. Based on the experimental results, the accuracy or the proposed method is analyzed and evaluated. © (2015) Trans Tech Publications.