Annealing of ZrO2 thin films studied by vacuum UV spectroscopic ellipsometry

안일신

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Annealing of ZrO2 thin films studied by vacuum UV spectroscopic ellipsometry

Authors: 안일신

Issue Date: 9-Nov-2009

Publisher: American Vacuum Society

Citation: AVS 56th International Symposium

URI: https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/24238

Conference Name: AVS 56th International Symposium

Place: San Jose, 미국

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Appears in Collections: COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY > DEPARTMENT OF PHOTONICS AND NANOELECTRONICS > 2. Conference Papers

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