Aerial image of mesh supported extreme ultraviolet pellicle
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Ko, Ki-Ho | - |
dc.contributor.author | Kim, Guk-Jin | - |
dc.contributor.author | Yeung, Michael | - |
dc.contributor.author | Barouch, Eytan | - |
dc.contributor.author | Kim, Mun-Ja | - |
dc.contributor.author | Kim, Seung-Sue | - |
dc.contributor.author | Oh, Hye-Keun | - |
dc.date.accessioned | 2021-06-23T01:23:55Z | - |
dc.date.available | 2021-06-23T01:23:55Z | - |
dc.date.issued | 2014-04 | - |
dc.identifier.issn | 0277-786X | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/25453 | - |
dc.description.abstract | We report the effect of the mesh support for the EUV pellicle on the wafer pattern image. The intensity distribution passing through the meshed pellicle was simulated with a partially coherent EUV beam showing that its non-uniformity and the CD uniformity are increased with the mesh width. In order to reduce a non-uniformity of the intensity distribution and CD uniformity, the mesh width should be narrower and the height becomes smaller as well. Thus, the image deformation on the wafer due to the mesh can be avoided by optimizing the mesh structure and thus the pellicle with the mesh support can be used for the EUV lithography. © 2014 SPIE. | - |
dc.format.extent | 8 | - |
dc.language | 영어 | - |
dc.language.iso | ENG | - |
dc.publisher | SPIE | - |
dc.title | Aerial image of mesh supported extreme ultraviolet pellicle | - |
dc.type | Article | - |
dc.publisher.location | 미국 | - |
dc.identifier.doi | 10.1117/12.2046202 | - |
dc.identifier.scopusid | 2-s2.0-84902136889 | - |
dc.identifier.wosid | 000339325800069 | - |
dc.identifier.bibliographicCitation | Proceedings of SPIE - The International Society for Optical Engineering, v.9048, pp 1 - 8 | - |
dc.citation.title | Proceedings of SPIE - The International Society for Optical Engineering | - |
dc.citation.volume | 9048 | - |
dc.citation.startPage | 1 | - |
dc.citation.endPage | 8 | - |
dc.type.docType | Conference Paper | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Optics | - |
dc.relation.journalWebOfScienceCategory | Optics | - |
dc.subject.keywordPlus | Engineering | - |
dc.subject.keywordPlus | Molecular physics | - |
dc.subject.keywordPlus | EUV | - |
dc.subject.keywordPlus | Extreme Ultraviolet | - |
dc.subject.keywordPlus | Image deformation | - |
dc.subject.keywordPlus | Intensity distribution | - |
dc.subject.keywordPlus | Mesh structures | - |
dc.subject.keywordPlus | Partially coherent | - |
dc.subject.keywordPlus | Pellicle | - |
dc.subject.keywordPlus | Wafer patterns | - |
dc.subject.keywordPlus | Extreme ultraviolet lithography | - |
dc.subject.keywordAuthor | EUV | - |
dc.subject.keywordAuthor | Mesh support | - |
dc.subject.keywordAuthor | Pellicle | - |
dc.identifier.url | https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9048/1/Aerial-image-of-mesh-supported-extreme-ultraviolet-pellicle/10.1117/12.2046202.short | - |
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