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Parallelization of thermochemical nanolithography
- Authors
- Carroll, Keith M.; Lu, Xi; Kim, Suenne; Gao, Yang; Kim, Hoe-Joon; Somnath, Suhas; Polloni, Laura; Sordan, Roman; King, William P.; Curtis, Jennifer E.; Riedo, Elisa
- Issue Date
- Nov-2014
- Publisher
- ROYAL SOC CHEMISTRY
- Keywords
- HEATED SILICON TIP; DATA-STORAGE; OXIDE; REDUCTION; FORCE MICROSCOPY; SIZE; DEVICES; LITHOGRAPHY; NANOFABRICATION
- Citation
- NANOSCALE, v.6, no.3, pp 1299 - 1304
- Pages
- 6
- Indexed
- SCI
SCIE
SCOPUS
- Journal Title
- NANOSCALE
- Volume
- 6
- Number
- 3
- Start Page
- 1299
- End Page
- 1304
- ISSN
- 2040-3364
2040-3372
- Abstract
- One of the most pressing technological challenges in the development of next generation nanoscale devices is the rapid, parallel, precise and robust fabrication of nanostructures. Here, we demonstrate the possibility to parallelize thermochemical nanolithography (TCNL) by employing five nano-tips for the fabrication of conjugated polymer nanostructures and graphene-based nanoribbons.
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Related Researcher
- Kim, Su enne
- COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY (DEPARTMENT OF PHOTONICS AND NANOELECTRONICS)