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Numerical simulation of Equipment Generated Particle Trajectories in Cleanroom
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안강호 | - |
| dc.date.accessioned | 2021-06-23T02:28:43Z | - |
| dc.date.available | 2021-06-23T02:28:43Z | - |
| dc.date.created | 2020-12-17 | - |
| dc.date.issued | 2007-11-10 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/26842 | - |
| dc.publisher | Core University Program | - |
| dc.title | Numerical simulation of Equipment Generated Particle Trajectories in Cleanroom | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | 안강호 | - |
| dc.identifier.bibliographicCitation | 2007 Koea-Japan Joint Workshop | - |
| dc.relation.isPartOf | 2007 Koea-Japan Joint Workshop | - |
| dc.citation.title | 2007 Koea-Japan Joint Workshop | - |
| dc.citation.conferencePlace | 부산 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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