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Instrumentation consideration in developing multichannel vacuum uv ellipsometry
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 오혜근 | - |
| dc.date.accessioned | 2021-06-23T02:52:11Z | - |
| dc.date.available | 2021-06-23T02:52:11Z | - |
| dc.date.created | 2020-12-17 | - |
| dc.date.issued | 2007-06-12 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/27392 | - |
| dc.publisher | ICSE | - |
| dc.title | Instrumentation consideration in developing multichannel vacuum uv ellipsometry | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | 오혜근 | - |
| dc.identifier.bibliographicCitation | 4th International Conference on spectroscopic ellipsometry | - |
| dc.relation.isPartOf | 4th International Conference on spectroscopic ellipsometry | - |
| dc.citation.title | 4th International Conference on spectroscopic ellipsometry | - |
| dc.citation.conferencePlace | Stockholm, Sweden | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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