Axiomatic Design of a Spatial Micromanipulator and Experimental Verification

Abstract

Ultra-precision positioning systems basically require high natural frequency and sufficient work space. To cope with this requirement, flexure hinge mechanism have been proposed. However, previous designs have difficulty satisfying the functional requirements of the system due to problems in the modeling and optimization process since they are coupled. This paper suggests a new design methodology and design-order based on axiomatic design to deal with the optimum design of micro mechanisms. A spatial 3-DOF parallel type micro mechanism was chosen as an exemplary device in this paper. Based on preliminary kinematic analysis and dynamic modeling of the system, an optimal design was conducted by use of SQP(sequential quadratic programming). FEM was employed to verify the feasibility of the analytic results. In FEM simulation, it is verified that the design results satisfy the demanded task space and natural frequency in constraint. The simulation results show that a natural frequency of 507.47Hz and a workspace of -0.5?x 0.5?can be ensured for a spatial 3-DOF micro manipulator which are in very close agreement with the specified goal of design