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Theoretical prediction of optical performance of Ru and Si capped reflectors for EUVL
- Authors
- 오혜근
- Issue Date
- 30-May-2006
- Publisher
- AVS
- Citation
- 50th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, EIPB
- Conference Name
- 50th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, EIPB
- Place
- 미국 볼티모어
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