Hierarchical multi-level block copolymer patterns by multiple self-assembly
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Jung, Hyunsung | - |
dc.contributor.author | Shin, Won Ho | - |
dc.contributor.author | Park, Tae Wan | - |
dc.contributor.author | Choi, Young Joong | - |
dc.contributor.author | Yoon, Young Joon | - |
dc.contributor.author | Park, Sung Heum | - |
dc.contributor.author | Lim, Jae-Hong | - |
dc.contributor.author | Kwon, Jung-Dae | - |
dc.contributor.author | Lee, Jung Woo | - |
dc.contributor.author | Kwon, Se-Hun | - |
dc.contributor.author | Seong, Gi Hun | - |
dc.contributor.author | Kim, Kwang Ho | - |
dc.contributor.author | Park, Woon Ik | - |
dc.date.accessioned | 2021-06-22T10:02:45Z | - |
dc.date.available | 2021-06-22T10:02:45Z | - |
dc.date.issued | 2019-05 | - |
dc.identifier.issn | 2040-3364 | - |
dc.identifier.issn | 2040-3372 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/2934 | - |
dc.description.abstract | Uniform, well-ordered sub-20 nm patterns can be generated by the templated self-assembly of block copolymers (BCPs) with a high Flory-Huggins interaction parameter (). However, the self-assembled BCP monolayers remain limited in the possible structural geometries. Here, we introduce a multiple self-assembly method which uses di-BCPs to produce diverse morphologies, such as dot, dot-in-honeycomb, line-on-dot, double-dot, pondering, dot-in-pondering, and line-on-pondering patterns. To improve the diversity of BCP morphological structures, we employed sphere-forming and cylinder-forming poly(styrene-block-dimethylsiloxane) (PS-b-PDMS) BCPs with a high . The self-assembled mono-layer and double-layer SiOx dot patterns were modified at a high temperature (approximate to 800 degrees C), showing hexagonally arranged (dot) and double-hexagonally arranged (pondering) SiOx patterns, respectively. We successfully obtained additional new nanostructures (big-dot, dot-in-honeycomb, line-on-dot, pondering, dot-in-pondering, and line-on-pondering types) through a second self-assembly of cylinder-forming BCPs using the dot and pondering patterns as guiding templates. This simple approach can likely be extended to the multiple self-assembly of many other BCPs with good functionality, significantly contributing to the development of various nanodevices. | - |
dc.format.extent | 9 | - |
dc.language | 영어 | - |
dc.language.iso | ENG | - |
dc.publisher | ROYAL SOC CHEMISTRY | - |
dc.title | Hierarchical multi-level block copolymer patterns by multiple self-assembly | - |
dc.type | Article | - |
dc.publisher.location | 영국 | - |
dc.identifier.doi | 10.1039/c9nr00774a | - |
dc.identifier.scopusid | 2-s2.0-85064889726 | - |
dc.identifier.wosid | 000466774500036 | - |
dc.identifier.bibliographicCitation | NANOSCALE, v.11, no.17, pp 8433 - 8441 | - |
dc.citation.title | NANOSCALE | - |
dc.citation.volume | 11 | - |
dc.citation.number | 17 | - |
dc.citation.startPage | 8433 | - |
dc.citation.endPage | 8441 | - |
dc.type.docType | Article | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | sci | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Chemistry | - |
dc.relation.journalResearchArea | Science & Technology - Other Topics | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Nanoscience & Nanotechnology | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.subject.keywordPlus | NANOSTRUCTURES | - |
dc.subject.keywordPlus | GRAPHOEPITAXY | - |
dc.subject.keywordPlus | LITHOGRAPHY | - |
dc.subject.keywordPlus | TEMPLATES | - |
dc.identifier.url | https://pubs.rsc.org/en/content/articlelanding/2019/NR/C9NR00774A | - |
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