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Contact Hole 패턴에 대한 Thermal Flow 전산모사
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 오혜근 | - |
| dc.date.accessioned | 2021-06-23T05:07:56Z | - |
| dc.date.available | 2021-06-23T05:07:56Z | - |
| dc.date.created | 2020-12-17 | - |
| dc.date.issued | 2004-10-23 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/30212 | - |
| dc.publisher | 2004 년도 한국물리학회 추계학술대회 | - |
| dc.title | Contact Hole 패턴에 대한 Thermal Flow 전산모사 | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | 오혜근 | - |
| dc.identifier.bibliographicCitation | 2004 년도 한국물리학회 추계학술대회 | - |
| dc.relation.isPartOf | 2004 년도 한국물리학회 추계학술대회 | - |
| dc.citation.title | 2004 년도 한국물리학회 추계학술대회 | - |
| dc.citation.conferencePlace | 제주 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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