Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Mask feature optimization by comparing the wafer critical dimension
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 오혜근 | - |
| dc.date.accessioned | 2021-06-23T05:47:56Z | - |
| dc.date.available | 2021-06-23T05:47:56Z | - |
| dc.date.created | 2020-12-17 | - |
| dc.date.issued | 2003-10-24 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/31045 | - |
| dc.publisher | 한국물리학회 | - |
| dc.title | Mask feature optimization by comparing the wafer critical dimension | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | 오혜근 | - |
| dc.identifier.bibliographicCitation | 2003 년도 한국물리학회 추계학술대회 | - |
| dc.relation.isPartOf | 2003 년도 한국물리학회 추계학술대회 | - |
| dc.citation.title | 2003 년도 한국물리학회 추계학술대회 | - |
| dc.citation.conferencePlace | 대구, 경북대 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
- Files in This Item
- There are no files associated with this item.
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.