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음향방출센서 및 자기연마입자를 활용한 나노스케일 패터닝 제어기술 개발
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이희환 | - |
| dc.contributor.author | 이성환 | - |
| dc.contributor.author | 오소민 | - |
| dc.contributor.author | 손권 | - |
| dc.date.accessioned | 2021-06-23T06:04:34Z | - |
| dc.date.available | 2021-06-23T06:04:34Z | - |
| dc.date.issued | 2012-11 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/31362 | - |
| dc.language | 한국어 | - |
| dc.language.iso | KOR | - |
| dc.publisher | 한국정밀공학회 | - |
| dc.title | 음향방출센서 및 자기연마입자를 활용한 나노스케일 패터닝 제어기술 개발 | - |
| dc.title.alternative | Development of Nano Scale Patterning control technology Using Acoustic Emission and Magnetic Abrasive finishing | - |
| dc.type | Article | - |
| dc.publisher.location | 대한민국 | - |
| dc.identifier.bibliographicCitation | 한국정밀공학회 2012년도 추계학술대회 논문집, pp 135 - 136 | - |
| dc.citation.title | 한국정밀공학회 2012년도 추계학술대회 논문집 | - |
| dc.citation.startPage | 135 | - |
| dc.citation.endPage | 136 | - |
| dc.description.isOpenAccess | N | - |
| dc.description.journalRegisteredClass | other | - |
| dc.subject.keywordAuthor | Acoustic emission | - |
| dc.subject.keywordAuthor | Magnetic Abrasive finishing | - |
| dc.subject.keywordAuthor | Atomic Force Microscope | - |
| dc.subject.keywordAuthor | Nano Scale | - |
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Related Researcher
- Lee, Seoung Hwan
- ERICA 공학대학 (DEPARTMENT OF MECHANICAL ENGINEERING)