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Predicting lifetime of pellicle through heat and mechanical distortion caused by particle defect on extreme ultraviolet pellicle
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 오혜근 | - |
| dc.date.accessioned | 2021-06-22T10:05:09Z | - |
| dc.date.available | 2021-06-22T10:05:09Z | - |
| dc.date.created | 2020-12-17 | - |
| dc.date.issued | 2020-02-26 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/3165 | - |
| dc.publisher | SPIE | - |
| dc.title | Predicting lifetime of pellicle through heat and mechanical distortion caused by particle defect on extreme ultraviolet pellicle | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | 오혜근 | - |
| dc.identifier.bibliographicCitation | SPIE 2020 Advanced Lithography | - |
| dc.relation.isPartOf | SPIE 2020 Advanced Lithography | - |
| dc.citation.title | SPIE 2020 Advanced Lithography | - |
| dc.citation.conferencePlace | San Jose, CA, USA | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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