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Single wavelength rotating analyzer ellipsometry for line-width control
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안일신 | - |
| dc.date.accessioned | 2021-06-23T06:16:12Z | - |
| dc.date.available | 2021-06-23T06:16:12Z | - |
| dc.date.created | 2020-12-17 | - |
| dc.date.issued | 2002-10-25 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/31734 | - |
| dc.description.abstract | Single wavelength rotating analyzer ellipsometry for line-width control | - |
| dc.publisher | 한국물리학회 | - |
| dc.title | Single wavelength rotating analyzer ellipsometry for line-width control | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | 안일신 | - |
| dc.identifier.bibliographicCitation | 추계한국물리학회학술대회 | - |
| dc.relation.isPartOf | 추계한국물리학회학술대회 | - |
| dc.citation.title | 추계한국물리학회학술대회 | - |
| dc.citation.conferencePlace | 한양대학교 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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