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Results 1-4 of 4 (Search time: 0.002 seconds).
Pattern size dependence on incident angle with 157 nm Lloyd`s mirror type interference illumination
오혜근
Article
Issue Date
2005
Citation
제12회 한국반도체학술대회 논문집
Publisher
한국물리학회
Mask error factor reduction by diffraction order optimization
오혜근
Article
Issue Date
2005
Citation
제12회 한국반도체학술대회 논문집
Publisher
한국물리학회
경계 운동에 의한 감광제 재흐름 공정 전산 시늉
오혜근
Article
Issue Date
2005
Citation
제12회 한국반도체학술대회 논문집
Publisher
한국물리학회
Shadow effect reduction by side wall structure modification of extreme ultraviolet lithography mask
오혜근
Article
Issue Date
2005
Citation
제12회 한국반도체학술대회 논문집
Publisher
한국물리학회
1
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OH, HYE KEUN
4
Date Issued
2005
4
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