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Results 1-7 of 7 (Search time: 0.002 seconds).
Contact Hole 패턴에 대한 Thermal Flow 전산모사
오혜근
Conference
Issue Date
2004
Citation
2004 년도 한국물리학회 추계학술대회
Publisher
2004 년도 한국물리학회 추계학술대회
Place
제주
Pattern size dependence on partial coherence and incident angle with 157 nm Lloyd`s mirror type interference illumination
오혜근
Conference
Issue Date
2004
Citation
2004 년도 한국물리학회 추계학술대회
Publisher
한국물리학회
Place
제주
The Search For Optimum Extreme Ultraviolet Mask In Terms Of Reducing The Absorber Shadow Effects
오혜근
Conference
Issue Date
2004
Citation
2004 년도 한국물리학회 추계학술대회
Publisher
한국물리학회
Place
제주
Experimental Comparison Among Different Polarizations With a Simple 193 nm Interference Illumination System
오혜근
Conference
Issue Date
2004
Citation
2004 년도 한국물리학회 추계학술대회
Publisher
한국물리학회
Place
제주
Mask Structure Optimization for Shadow Effect Reduction in Extreme Ultraviolet? Lithography
오혜근
Conference
Issue Date
2004
Citation
2004 년도 한국물리학회 추계학술대회
Publisher
한국물리학회
Place
제주
Spectroscopic ellipsometry studies on the retardance of the rubbed polymide layer
오혜근
Conference
Issue Date
2004
Citation
2004 년도 한국물리학회 추계학술대회
Publisher
한국물리학회
Place
제주
Mask Error Factor Reduction By Process Proximity Corrected Mask Optimization
오혜근
Conference
Issue Date
2004
Citation
2004 년도 한국물리학회 추계학술대회
Publisher
한국물리학회
Place
제주
1
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Author
OH, HYE KEUN
7
Date Issued
2004
7
Type
Conference
7
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