한국어
LIBRARY
Communities & Collections
Researchers
Titles
Issue Date
Journals
검색
Search
All of ScholarWorks
COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY
DEPARTMENT OF APPLIED PHYSICS
1. Journal Articles
2. Conference Papers
3. Books & Book Chapters
4. Patents
5. Others
Current filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Add filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Results/Page
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
Sort items by
Relevance
Title
Issue Date
In order
Ascending
Descending
Authors/record
All
1
5
10
15
20
25
30
35
40
45
50
Results 1-2 of 2 (Search time: 0.001 seconds).
Factors of optical proximity correction in EUV lithography
오혜근
Conference
Issue Date
2007
Citation
2007 International EUVL Symposium
Publisher
SEMATECH
Place
Sapporo, Japan
Limitation of the acid diffusion length in exteme ultraviolet lithography
오혜근
Conference
Issue Date
2007
Citation
2007 International EUVL Symposium
Publisher
SEMATECH
Place
Sapporo, Japan
1
Discover
Author
OH, HYE KEUN
2
Date Issued
2007
2
Type
Conference
2
BROWSE
한국어
Communities & Collections
Researchers
Titles
Journals
LIBRARY