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Results 1-4 of 4 (Search time: 0.002 seconds).
Thermo-mechanical distortion caused by particle defect on extreme ultraviolet pellicle
오혜근
Conference
Issue Date
2017
Citation
International Conference on Extreme UltraViolet Lithography
Publisher
SPIE
Place
Montery, CA, USA
Thermo-mechanical behavior analysis of extreme-ultraviolet pellicle cooling by H2 flow
오혜근
Conference
Issue Date
2017
Citation
International Conference on Extreme UltraViolet Lithography
Publisher
SPIE
Place
Montery, CA, USA
Wrinkle formation analysis in extreme-ultraviolet pellicle
오혜근
Conference
Issue Date
2017
Citation
International Conference on Extreme UltraViolet Lithography
Publisher
SPIE
Place
Montery, CA, USA
Impact of aberration with various illumination systems and minimizing critical dimension difference through optical proximity correction
오혜근
Conference
Issue Date
2017
Citation
International Conference on Extreme UltraViolet Lithography
Publisher
SPIE
Place
Montery, CA, USA
1
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Author
OH, HYE KEUN
4
Date Issued
2017
4
Type
Conference
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