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"Which mask is preferred for sub-60 nm node imaging"
오혜근
Article
Issue Date
2006
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MNC
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일본응용물리학회
The process latitude dependency on local photomask haze defect
오혜근
Article
Issue Date
2006
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MNC
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Influence of defect on top of the absorber in EUV lithography
오혜근
Article
Issue Date
2006
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MNC
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일본응용물리학회
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OH, HYE KEUN
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2006
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