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Results 1-4 of 4 (Search time: 0.005 seconds).
Performnance of small field 193mm exposure system
오혜근
Conference
Issue Date
1997
Citation
Microlithography
Publisher
SPIE
Refermulation for the modeling of latentimage formation in Photography, using numerical absorbing boundary wnditions
오혜근
Conference
Issue Date
1998
Citation
Microlithography
Publisher
SPIE
Photography simulation on nonplanar substrate using FEM with absorbing boundaryconditions
오혜근
Conference
Issue Date
1997
Citation
Microlithography
Publisher
SPIE
Linewidth variation with different sublayers for 0.25um MFS in DUV lithography
오혜근
Conference
Issue Date
1997
Citation
Microlithography
Publisher
SPIE
1
Discover
Author
OH, HYE KEUN
4
Date Issued
1998
1
1997
3
Type
Conference
4
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