노광효과에 따른 I-선 및 g-선 감광제와 193 nm 감광제의 두께 변화 메카니즘 비교
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 오혜근 | - |
dc.date.accessioned | 2021-06-23T08:11:57Z | - |
dc.date.available | 2021-06-23T08:11:57Z | - |
dc.date.created | 2020-12-17 | - |
dc.date.issued | 1999-04-01 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/34152 | - |
dc.publisher | 한국물리학회 | - |
dc.title | 노광효과에 따른 I-선 및 g-선 감광제와 193 nm 감광제의 두께 변화 메카니즘 비교 | - |
dc.type | Conference | - |
dc.contributor.affiliatedAuthor | 오혜근 | - |
dc.identifier.bibliographicCitation | 한국물리학회 | - |
dc.relation.isPartOf | 한국물리학회 | - |
dc.citation.title | 한국물리학회 | - |
dc.type.rims | CONF | - |
dc.description.journalClass | 2 | - |
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