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기체크로마토그래피/비행시간질량분석기(GC/TOF)를 이용한 반도체 공정 환경에서 발생하는 유기오염물질 표적/비표적 추적 기법
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 문효방[문효방] | - |
| dc.date.accessioned | 2021-06-23T08:40:07Z | - |
| dc.date.available | 2021-06-23T08:40:07Z | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/34747 | - |
| dc.title | 기체크로마토그래피/비행시간질량분석기(GC/TOF)를 이용한 반도체 공정 환경에서 발생하는 유기오염물질 표적/비표적 추적 기법 | - |
| dc.title.alternative | Tracking tool based on target and non-target screening analysis for organic contaminants in semi-conductor process with gas chromatography/time-of-flight mass spectrometry (GC/TOF) | - |
| dc.type | Patent | - |
| dc.contributor.affiliatedAuthor | 문효방[문효방] | - |
| dc.type.rims | PAT | - |
| dc.type.iprs | 특허 | - |
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Related Researcher
- Moon, Hyo-Bang
- COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY (DEPARTMENT OF MARINE SCIENCE AND CONVERGENCE ENGINEERING)