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단결정 실리사이드 하부전극을 이용한 반도체 나노선 성장 및 기판수직 나노선의 제작 방법

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이정호[이정호]
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https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/35514
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COLLEGE OF ENGINEERING SCIENCES > ETC > 4. Patents

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ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)
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