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나노구조의 다성분계 박막 게터 및 그 제조 방법nanostructured multi-component thin-film getter and method of fabricating the same

Alternative Title
nanostructured multi-component thin-film getter and method of fabricating the same
Authors
좌용호[좌용호]
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https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/35550
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COLLEGE OF ENGINEERING SCIENCES > ETC > 4. Patents

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CHOA, YONG HO
ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)
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