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광학식 미세 형상 측정기의 센서 융합 알고리즘 개발Development of Optical Surface Profiler Sensor Fusion Algorithm

Other Titles
Development of Optical Surface Profiler Sensor Fusion Algorithm
Authors
이동혁안정화조남규
Issue Date
Oct-2011
Publisher
한국정밀공학회
Keywords
Correlation; Sensor Fusion Algorithm; Optical profilometer; Overlay
Citation
한국정밀공학회 2011년도 추계학술대회 논문집, v.하권, no. , pp.641 - 642
Indexed
OTHER
Journal Title
한국정밀공학회 2011년도 추계학술대회 논문집
Volume
하권
Start Page
641
End Page
642
URI
https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/36540
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COLLEGE OF ENGINEERING SCIENCES > DEPARTMENT OF MECHANICAL ENGINEERING > 1. Journal Articles

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CHO, NAHM GYOO
ERICA 공학대학 (DEPARTMENT OF MECHANICAL ENGINEERING)
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