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멀티프로브 기반의 3차원 형상 및 박막두께의 동일위치 측정 장치 및 방법
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 조남규[조남규] | - |
| dc.date.accessioned | 2021-06-23T10:49:29Z | - |
| dc.date.available | 2021-06-23T10:49:29Z | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/37798 | - |
| dc.title | 멀티프로브 기반의 3차원 형상 및 박막두께의 동일위치 측정 장치 및 방법 | - |
| dc.type | Patent | - |
| dc.contributor.affiliatedAuthor | 조남규[조남규] | - |
| dc.type.rims | PAT | - |
| dc.type.iprs | 특허 | - |
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Collections - COLLEGE OF ENGINEERING SCIENCES > DEPARTMENT OF MECHANICAL ENGINEERING > 4. Patents
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Related Researcher
- CHO, NAHM GYOO
- ERICA 공학대학 (DEPARTMENT OF MECHANICAL ENGINEERING)