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Measurement of local pellicle thinning and line-width variation with different pellicle thicknesses
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 오혜근 | - |
| dc.date.accessioned | 2021-06-23T11:03:20Z | - |
| dc.date.available | 2021-06-23T11:03:20Z | - |
| dc.date.created | 2021-02-18 | - |
| dc.date.issued | 2011-04-04 | - |
| dc.identifier.issn | 0277786x | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/38143 | - |
| dc.publisher | SPIE | - |
| dc.title | Measurement of local pellicle thinning and line-width variation with different pellicle thicknesses | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | 오혜근 | - |
| dc.identifier.bibliographicCitation | Proceedings of SPIE, v.7973 | - |
| dc.relation.isPartOf | Proceedings of SPIE | - |
| dc.citation.title | Proceedings of SPIE | - |
| dc.citation.volume | 7973 | - |
| dc.type.rims | ART | - |
| dc.description.journalClass | 3 | - |
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