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전체 광부품 회전형 분광 타원해석기
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안일신[안일신] | - |
| dc.date.accessioned | 2021-06-23T11:12:11Z | - |
| dc.date.available | 2021-06-23T11:12:11Z | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/38605 | - |
| dc.title | 전체 광부품 회전형 분광 타원해석기 | - |
| dc.title.alternative | Rotating All-Elements Spectroscopic Ellipsometer | - |
| dc.type | Patent | - |
| dc.contributor.affiliatedAuthor | 안일신[안일신] | - |
| dc.type.rims | PAT | - |
| dc.type.iprs | 특허 | - |
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