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Multichannel ellipsometry for monitoring processes
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | An, Ilsin | - |
| dc.date.accessioned | 2021-06-23T13:37:42Z | - |
| dc.date.available | 2021-06-23T13:37:42Z | - |
| dc.date.issued | 2010-03 | - |
| dc.identifier.issn | 1934-2608 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/39932 | - |
| dc.format.extent | 5 | - |
| dc.language | 영어 | - |
| dc.language.iso | ENG | - |
| dc.publisher | Society of Photo-Optical Instrumentation Engineers | - |
| dc.title | Multichannel ellipsometry for monitoring processes | - |
| dc.type | Article | - |
| dc.publisher.location | 미국 | - |
| dc.identifier.doi | 10.1117/1.3374056 | - |
| dc.identifier.scopusid | 2-s2.0-80455149820 | - |
| dc.identifier.wosid | 000278049300001 | - |
| dc.identifier.bibliographicCitation | Journal of Nanophotonics, v.4, pp 1 - 5 | - |
| dc.citation.title | Journal of Nanophotonics | - |
| dc.citation.volume | 4 | - |
| dc.citation.startPage | 1 | - |
| dc.citation.endPage | 5 | - |
| dc.type.docType | Editorial Material | - |
| dc.description.isOpenAccess | N | - |
| dc.description.journalRegisteredClass | scie | - |
| dc.description.journalRegisteredClass | scopus | - |
| dc.relation.journalResearchArea | Science & Technology - Other Topics | - |
| dc.relation.journalResearchArea | Optics | - |
| dc.relation.journalWebOfScienceCategory | Nanoscience & Nanotechnology | - |
| dc.relation.journalWebOfScienceCategory | Optics | - |
| dc.subject.keywordPlus | SPECTROSCOPIC ELLIPSOMETRY | - |
| dc.subject.keywordPlus | THIN-FILM | - |
| dc.identifier.url | https://www.spiedigitallibrary.org/journals/journal-of-nanophotonics/volume-4/issue-01/040302/Commentary-Multichannel-ellipsometry-for-monitoring-processes/10.1117/1.3374056.full?SSO=1 | - |
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