Kim, Byunghoon; Jeong, Youngseon; Tong,Seunghoon; Chang,Inkap; Jeong, Myongkee
ArticleIssue Date2015CitationIEEE Transactions on Semiconductor Manufacturing, v.28, no.1, pp.41 - 49PublisherInstitute of Electrical and Electronics Engineers Inc.
ArticleIssue Date2016CitationIEEE Transactions on Semiconductor Manufacturing, v.29, no.1, pp.57 - 65PublisherInstitute of Electrical and Electronics Engineers Inc.