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COLLEGE OF ENGINEERING SCIENCES
DEPARTMENT OF INDUSTRIAL & MANAGEMENT ENGINEERING
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KCI
반도체 클러스터 장비에서 웨이퍼 이동지연을 허용하는 스케줄링 방법
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허선
; 이현; 박유진; 양선호
Article
Issue Date
2011
Citation
한국생산관리학회지, v.22, no.4, pp.417 - 430
Publisher
한국생산관리학회
KCI
클러스터 툴의 예방유지보수 스케줄링 모형
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이현; 박유진;
허선
Article
Issue Date
2012
Citation
산업공학(IE interfaces), v.25, no.1, pp.127 - 133
Publisher
대한산업공학회
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Hur, Sun
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semiconductor
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450mm wafer
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450mm wafer production
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450mm 웨이퍼
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preventive maintenance
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real-time scheduling
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renewal process
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wafer delay
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실시간 스케줄링
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