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Ellipsometry for semiconductor devices
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안일신 | - |
| dc.date.accessioned | 2021-06-23T15:42:14Z | - |
| dc.date.available | 2021-06-23T15:42:14Z | - |
| dc.date.created | 2021-02-18 | - |
| dc.date.issued | 2009-02-20 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/41387 | - |
| dc.publisher | SEMI | - |
| dc.title | Ellipsometry for semiconductor devices | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | 안일신 | - |
| dc.identifier.bibliographicCitation | Proceedings of SEMI Technology Symposium 2009 | - |
| dc.relation.isPartOf | Proceedings of SEMI Technology Symposium 2009 | - |
| dc.citation.title | Proceedings of SEMI Technology Symposium 2009 | - |
| dc.type.rims | ART | - |
| dc.description.journalClass | 3 | - |
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