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Study of Compositional Change In FC(Fluorinated Carbon)Film with Variation in Substrate Temperature
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이선영 | - |
| dc.date.accessioned | 2021-06-23T18:03:03Z | - |
| dc.date.available | 2021-06-23T18:03:03Z | - |
| dc.date.issued | 2008-02 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/42644 | - |
| dc.description.abstract | We have studied the effect of substrate temperature on FC(Fluorinated carbon) film. Fluorinated carbon(FC) is a chemical compound that contains carbon-fluorine bonds. FC film has a hydrophobic property. FC film was deposited by PECVD(plasma enhancedchemical vapor deposition) using C4F8 (Octafluorocyclobutane) precursor. After film was deposited, contact angle, surface energy and thickness were measured. Organic chemical analysis using FTIR(Fourier Transform Infrared Spectrometer)and Chemical bonding analysis using XPS(X-ray Photoelectron Spectroscopy) were performed. BTIR and XPS results showed some differences among samplesFTIR results showed extra peaks for samples deposited at 25oC and 100 oC substrate temperatures. XPS results showed that C=O bond was detected for the sample deposited at 250 oC substrate temperature. | - |
| dc.publisher | 한국물리학회 | - |
| dc.title | Study of Compositional Change In FC(Fluorinated Carbon)Film with Variation in Substrate Temperature | - |
| dc.type | Article | - |
| dc.identifier.bibliographicCitation | 제15회 한국반도체 학술대회 발표논문 집 | - |
| dc.citation.title | 제15회 한국반도체 학술대회 발표논문 집 | - |
| dc.description.isOpenAccess | N | - |
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Related Researcher
- Lee, Sunyong Caroline
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)