열공압형 마이크로펌프의 액추에이터 박막 거동 특성에 관한 수치적 연구

Abstract

In this study, the behavior characteristics of the actuator diaphragm in a thermopneumatic micropump are numerically investigated. To verify the validity of the present numerical results for the diaphragm deflection, the present results obtained from the transient analysis are compared with those of an experiment. The present numerical results agree well with the experimental data within the maximum error of about 6 ㎛ at low frequency. Parametric investigations are also performed to examine how the behavior characteristics of the diaphragm are affected by the thickness of the diaphragm and the diameter of the actuator chamber. As the thickness of the diaphragm decreases, the center deflection of the diaphragm becomes very sensitive for all operating frequencies. It is also found that the increasing rate of the center deflection of the diaphragm increases with the diameter of the chamber, as the frequency decreases. The present results indicate that the diameter of the chamber has little effect on the center deflection of the diaphragm when the frequency is greater than 10㎐.