PZT를 이용한Semi-inchworm구동기법의 초정밀 회전 스테이지 개발
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 윤덕원 | - |
dc.contributor.author | 안강호 | - |
dc.contributor.author | 한창수 | - |
dc.date.accessioned | 2021-06-23T20:38:34Z | - |
dc.date.available | 2021-06-23T20:38:34Z | - |
dc.date.issued | 2007-03 | - |
dc.identifier.issn | 1738-2270 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/44160 | - |
dc.description.abstract | Recently PZT is used in ultra precision mechanism field. PZT has a small motion range although it has a high resolution. Many methods, such as inchworm, impact driving, etc., have been applied for the expansion of the motion range.In this study, the new actuating mechanism for rotational motion with two PZT actuators is proposed. The ultra precision rotational actuator which is made by proposed mechanism is able to operate both coarse and fine motion. The design parameters of the proposed mechanism are considered to improve the performance of the system. The rotational stage which is applied by the proposed mechanism is fabricated. The resolution and velocity for fabricated rotational stage are measured by laser interferometer. | - |
dc.format.extent | 5 | - |
dc.language | 한국어 | - |
dc.language.iso | KOR | - |
dc.publisher | 한국반도체디스플레이기술학회 | - |
dc.title | PZT를 이용한Semi-inchworm구동기법의 초정밀 회전 스테이지 개발 | - |
dc.title.alternative | Development of ultra precision rotational stage using Semi-inchworm driving mechanism with PZT | - |
dc.type | Article | - |
dc.publisher.location | 대한민국 | - |
dc.identifier.bibliographicCitation | 반도체디스플레이기술학회지, v.6, no.1, pp 37 - 41 | - |
dc.citation.title | 반도체디스플레이기술학회지 | - |
dc.citation.volume | 6 | - |
dc.citation.number | 1 | - |
dc.citation.startPage | 37 | - |
dc.citation.endPage | 41 | - |
dc.identifier.kciid | ART001049566 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | kciCandi | - |
dc.subject.keywordAuthor | Rotational stage | - |
dc.subject.keywordAuthor | Impact drive | - |
dc.subject.keywordAuthor | Inchworm drive | - |
dc.subject.keywordAuthor | PZT | - |
dc.subject.keywordAuthor | Semi-inchworm | - |
dc.subject.keywordAuthor | Rotational stage | - |
dc.subject.keywordAuthor | Impact drive | - |
dc.subject.keywordAuthor | Inchworm drive | - |
dc.subject.keywordAuthor | PZT | - |
dc.subject.keywordAuthor | Semi-inchworm | - |
dc.identifier.url | https://scienceon.kisti.re.kr/srch/selectPORSrchArticle.do?cn=JAKO200725522708926&SITE=CLICK | - |
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