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A Dual-Servo Type VCM for a Nano-Level Measurement System

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dc.contributor.authorYong-Min Yoo-
dc.contributor.author권병일-
dc.date.accessioned2021-06-23T20:38:37Z-
dc.date.available2021-06-23T20:38:37Z-
dc.date.created2021-02-01-
dc.date.issued2007-03-
dc.identifier.issn1975-0102-
dc.identifier.urihttps://scholarworks.bwise.kr/erica/handle/2021.sw.erica/44162-
dc.description.abstract- In this paper, a dual-servo type VCM (Voice Coil Motor) for the measuring of nano-leveldisplacement and small thrust is proposed and developed. The shape of VCM for improving the resolution of displacement and ensuring a large displacement are presented. The FEM (finite element method) is utilized to analyze the characteristics of VCM that produces linear driving thrust and satisfies the thrust that the measurement system requires. The Prototype is fabricated and an experiment is performed in order to measure displacement. As a result of simulation and testing, the proposed VCM shows the applicable possibility for a nano-level measurement system.-
dc.language영어-
dc.language.isoen-
dc.publisher대한전기학회-
dc.titleA Dual-Servo Type VCM for a Nano-Level Measurement System-
dc.typeArticle-
dc.contributor.affiliatedAuthor권병일-
dc.identifier.bibliographicCitationJournal of Electrical Engineering & Technology, v.2, no.1, pp.50 - 54-
dc.relation.isPartOfJournal of Electrical Engineering & Technology-
dc.citation.titleJournal of Electrical Engineering & Technology-
dc.citation.volume2-
dc.citation.number1-
dc.citation.startPage50-
dc.citation.endPage54-
dc.type.rimsART-
dc.identifier.kciidART001056400-
dc.description.journalClass2-
dc.description.isOpenAccessN-
dc.description.journalRegisteredClasskci-
dc.subject.keywordAuthorDual-servo-
dc.subject.keywordAuthorFinite element analysis-
dc.subject.keywordAuthorMeasurement system-
dc.subject.keywordAuthorVoice coil motor-
dc.identifier.urlhttps://www.kci.go.kr/kciportal/ci/sereArticleSearch/ciSereArtiView.kci?sereArticleSearchBean.artiId=ART001056400-
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