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진공 환경내 실시간 입자 모니터링 시스템의 개발 및 성능평가
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안강호 | - |
| dc.contributor.author | 김용민 | - |
| dc.contributor.author | 권용택 | - |
| dc.date.accessioned | 2021-06-23T21:40:04Z | - |
| dc.date.available | 2021-06-23T21:40:04Z | - |
| dc.date.issued | 2006-05 | - |
| dc.identifier.issn | 15986543 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/44873 | - |
| dc.format.extent | 5 | - |
| dc.language | 한국어 | - |
| dc.language.iso | KOR | - |
| dc.publisher | 한국반도체장비학회 | - |
| dc.title | 진공 환경내 실시간 입자 모니터링 시스템의 개발 및 성능평가 | - |
| dc.title.alternative | Development and Performance Test of In-situ Particle Monitoring System using Ion-counter in Vacuum Environments | - |
| dc.type | Article | - |
| dc.publisher.location | 대한민국 | - |
| dc.identifier.bibliographicCitation | 한국반도체장비학회지, v.5, no.1, pp 45 - 49 | - |
| dc.citation.title | 한국반도체장비학회지 | - |
| dc.citation.volume | 5 | - |
| dc.citation.number | 1 | - |
| dc.citation.startPage | 45 | - |
| dc.citation.endPage | 49 | - |
| dc.description.isOpenAccess | N | - |
| dc.description.journalRegisteredClass | domestic | - |
| dc.identifier.url | https://www.dbpia.co.kr/Journal/articleDetail?nodeId=NODE09616040 | - |
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