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AE를 이용한 AFM 연성 영역 가공 특성 연구Characteristic of Ductile Regime AFM Machining Using Acoustic Emission
- Other Titles
- Characteristic of Ductile Regime AFM Machining Using Acoustic Emission
- Issue Date
- Aug-2006
- Publisher
- 한국생산제조학회
- Keywords
- Acoustic Emission(음향 방출); Ductile/brittle transition(연성/취성 전이 ); Nano machining(나노 가공); Acoustic Emission(음향 방출); Ductile/brittle transition(연성/취성 전이 ); Nano machining(나노 가공)
- Citation
- 한국생산제조학회지, v.15, no.4, pp 15 - 21
- Pages
- 7
- Indexed
- KCI
- Journal Title
- 한국생산제조학회지
- Volume
- 15
- Number
- 4
- Start Page
- 15
- End Page
- 21
- ISSN
- 2508-5093
2508-5107
- Abstract
- Recently, atomic force microscope(AFM) with suitable tips is being used for nano fabrication/nanometric machining purposes. In this paper, acoustic emission(AE) was introduced to monitor the nanometric machining of brittle materials(silicon) using AFM. In the experiments, AE responses were sampled, as the tip load was linearly increased(ramped load), to investigate the machining characteristics during a continuous movement. By analyzing the experimental results, it can be concluded that measured AE energy is sensitive to changes in the mechanism of material removal including the ductile-brittle transition during the nanometric machining. The critical depth of cut value for the transition is evaluated and discussed.
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Related Researcher
- Lee, Seoung Hwan
- ERICA 공학대학 (DEPARTMENT OF MECHANICAL ENGINEERING)