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Development of in-situ SUB-100nm particle detection in vacuum system

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dc.contributor.authorAhn, Kang-Ho-
dc.contributor.authorKim, Yong-min-
dc.date.accessioned2021-06-23T22:39:22Z-
dc.date.available2021-06-23T22:39:22Z-
dc.date.issued2006-10-
dc.identifier.issn1013-9826-
dc.identifier.issn1662-9795-
dc.identifier.urihttps://scholarworks.bwise.kr/erica/handle/2021.sw.erica/45375-
dc.description.abstractA feasibility test for real-time fine particle measurements in vacuum semiconductor processing equipment has been conducted. The approach in monitoring particles in process equipment is an installation of a sensor at a critical location inside the process equipment (hence the term 'in-situ') to track free particle levels in real-time. Common method for particle detection in a process chamber today is a use of test wafer with a laser wafer scanner. However, this method does not give a real time information of the particle status in the process chamber. In this paper, a new method has been developed to detect particles in real time in vacuum system for particles smaller than an optical method can detect. The system consists of a particle charging region and a particle detection region in a vacuum system. Particles with 50nm are successfully detected at about 10 torr region.-
dc.format.extent4-
dc.language영어-
dc.language.isoENG-
dc.publisherTrans Tech Publications Ltd.-
dc.titleDevelopment of in-situ SUB-100nm particle detection in vacuum system-
dc.typeArticle-
dc.publisher.location스위스-
dc.identifier.doi10.4028/www.scientific.net/KEM.321-323.1707-
dc.identifier.scopusid2-s2.0-33749455358-
dc.identifier.wosid000241427900384-
dc.identifier.bibliographicCitationKey Engineering Materials, v.321-323, pp 1707 - 1710-
dc.citation.titleKey Engineering Materials-
dc.citation.volume321-323-
dc.citation.startPage1707-
dc.citation.endPage1710-
dc.type.docTypeArticle; Proceedings Paper-
dc.description.isOpenAccessN-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.relation.journalResearchAreaMaterials Science-
dc.relation.journalWebOfScienceCategoryMaterials Science, Ceramics-
dc.relation.journalWebOfScienceCategoryMaterials Science, Characterization & Testing-
dc.relation.journalWebOfScienceCategoryMaterials Science, Composites-
dc.subject.keywordAuthorparticle charging in vacuum-
dc.subject.keywordAuthorvacuum particle-
dc.subject.keywordAuthorsemiconductor processing equipment-
dc.subject.keywordAuthormonodisperse particle-
dc.subject.keywordAuthorcorona charging-
dc.subject.keywordAuthorFaraday cup-
dc.identifier.urlhttps://www.scientific.net/KEM.321-323.1707-
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COLLEGE OF ENGINEERING SCIENCES > DEPARTMENT OF MECHANICAL ENGINEERING > 1. Journal Articles

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