Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Development of in-situ sub-100nm particle detection in vacuum system
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안강호 | - |
| dc.date.accessioned | 2021-06-23T22:42:48Z | - |
| dc.date.available | 2021-06-23T22:42:48Z | - |
| dc.date.created | 2021-02-18 | - |
| dc.date.issued | 2005-11-07 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/45547 | - |
| dc.publisher | ICC | - |
| dc.title | Development of in-situ sub-100nm particle detection in vacuum system | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | 안강호 | - |
| dc.identifier.bibliographicCitation | The 1st International Conference on Advanced Nondestructive Evaluation | - |
| dc.relation.isPartOf | The 1st International Conference on Advanced Nondestructive Evaluation | - |
| dc.citation.title | The 1st International Conference on Advanced Nondestructive Evaluation | - |
| dc.type.rims | ART | - |
| dc.description.journalClass | 3 | - |
- Files in This Item
- There are no files associated with this item.
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.