Extreme-ultraviolet pellicle durability comparison for better lifetime
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Shin, H.-G. | - |
dc.contributor.author | Oh, H.-K. | - |
dc.date.accessioned | 2021-06-22T11:01:50Z | - |
dc.date.available | 2021-06-22T11:01:50Z | - |
dc.date.created | 2021-01-22 | - |
dc.date.issued | 2019-09 | - |
dc.identifier.issn | 0277-786X | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/4576 | - |
dc.description.abstract | To accelerate extreme ultraviolet lithography manufacturing, a better pellicle which has a longer lifetime is required. Various materials and their combinations are suggested and implemented to extend the lifetime. Using finite element method, we analyzed the mechanical behavior of pellicle in terms of crack time when a pellicle begins to tear off. Without thermal property analysis, we were able to get relative crack times for various pellicle structures. Single walled carbon nanotube has the largest relative crack time but needed to be commercialization and multi-layer pSi core pellicle has longer lifetime than a single pSi core pellicle. Additionally, increasing Ru capping layer helps to strengthen the mechanical properties of the pSi core pellicle. © 2019 SPIE. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | SPIE | - |
dc.title | Extreme-ultraviolet pellicle durability comparison for better lifetime | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Oh, H.-K. | - |
dc.identifier.doi | 10.1117/12.2536992 | - |
dc.identifier.scopusid | 2-s2.0-85077311525 | - |
dc.identifier.bibliographicCitation | Proceedings of SPIE - The International Society for Optical Engineering, v.11147 | - |
dc.relation.isPartOf | Proceedings of SPIE - The International Society for Optical Engineering | - |
dc.citation.title | Proceedings of SPIE - The International Society for Optical Engineering | - |
dc.citation.volume | 11147 | - |
dc.type.rims | ART | - |
dc.type.docType | Conference Paper | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scopus | - |
dc.subject.keywordPlus | Extreme ultraviolet lithography | - |
dc.subject.keywordPlus | Lithography | - |
dc.subject.keywordPlus | Particles (particulate matter) | - |
dc.subject.keywordPlus | Single-walled carbon nanotubes (SWCN) | - |
dc.subject.keywordPlus | EUV pellicle | - |
dc.subject.keywordPlus | Extreme Ultraviolet | - |
dc.subject.keywordPlus | Mechanical behavior | - |
dc.subject.keywordPlus | Property analysis | - |
dc.subject.keywordPlus | Relative crack time | - |
dc.subject.keywordPlus | Ru capping layers | - |
dc.subject.keywordPlus | Cracks | - |
dc.subject.keywordAuthor | EUV | - |
dc.subject.keywordAuthor | EUV pellicle | - |
dc.subject.keywordAuthor | HVM | - |
dc.subject.keywordAuthor | Lithography | - |
dc.subject.keywordAuthor | Particle | - |
dc.subject.keywordAuthor | Relative crack time | - |
dc.identifier.url | https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11147/2536992/Extreme-ultraviolet-pellicle-durability-comparison-for-better-lifetime/10.1117/12.2536992.short | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
55 Hanyangdeahak-ro, Sangnok-gu, Ansan, Gyeonggi-do, 15588, Korea+82-31-400-4269 sweetbrain@hanyang.ac.kr
COPYRIGHT © 2021 HANYANG UNIVERSITY. ALL RIGHTS RESERVED.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.