코로나 방전을 이용한 진공 내 실시간 입자 모니터링 시스템의 개발 및 성능 평가
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 안강호 | - |
dc.date.accessioned | 2021-06-23T23:05:38Z | - |
dc.date.available | 2021-06-23T23:05:38Z | - |
dc.date.created | 2021-02-18 | - |
dc.date.issued | 2005-07-07 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/45806 | - |
dc.publisher | 한국입자에어로졸학회 | - |
dc.title | 코로나 방전을 이용한 진공 내 실시간 입자 모니터링 시스템의 개발 및 성능 평가 | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | 안강호 | - |
dc.identifier.bibliographicCitation | 6th Korean Conference on Aerosol and Particle Technology | - |
dc.relation.isPartOf | 6th Korean Conference on Aerosol and Particle Technology | - |
dc.citation.title | 6th Korean Conference on Aerosol and Particle Technology | - |
dc.type.rims | ART | - |
dc.description.journalClass | 3 | - |
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