Pattern size dependence on incident angle with 157 nm Lloyd`s mirror type interference illumination
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 오혜근 | - |
dc.date.accessioned | 2021-06-23T23:40:11Z | - |
dc.date.available | 2021-06-23T23:40:11Z | - |
dc.date.created | 2021-02-18 | - |
dc.date.issued | 2005-02-24 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/46077 | - |
dc.publisher | 한국물리학회 | - |
dc.title | Pattern size dependence on incident angle with 157 nm Lloyd`s mirror type interference illumination | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | 오혜근 | - |
dc.identifier.bibliographicCitation | 제12회 한국반도체학술대회 논문집 | - |
dc.relation.isPartOf | 제12회 한국반도체학술대회 논문집 | - |
dc.citation.title | 제12회 한국반도체학술대회 논문집 | - |
dc.type.rims | ART | - |
dc.description.journalClass | 3 | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
55 Hanyangdeahak-ro, Sangnok-gu, Ansan, Gyeonggi-do, 15588, Korea+82-31-400-4269 sweetbrain@hanyang.ac.kr
COPYRIGHT © 2021 HANYANG UNIVERSITY. ALL RIGHTS RESERVED.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.